Chi-Yuan Shih | PubMed Health

PubMed2006

Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate.

This paper presents a novel channel fabrication technology of bulk-micromachined monolithic embedded polymer channels in silicon substrate. The fabrication process favorably obviates the need for sacrificial materials in surface-micromachined channels and wafer-bonding in conventional bulk-micromachined channels. Single-layer-deposited parylene C (poly-para-xylylene C) is selected as a structural material in the microfabricated channels/columns to conduct life science research. High pressure capacity can be obtained in these channels by the assistance of silicon substrate support to meet the needs of high-pressure loading conditions in microfluidic applications. The fabrication technology is completely compatible with further lithographic CMOS/MEMS processes, which enables the fabricated embedded structures to be totally integrated with on-chip micro/nano-sensors/actuators/structures for miniaturized lab-on-a-chip systems. An exemplary process was described to show the feasibility of combining bulk micromachining and surface micromachining techniques in process integration. Embedded channels in versatile cross-section profile designs have been fabricated and characterized to demonstrate their capabilities for various applications. A quasi-hemi-circular-shaped embedded parylene channel has been fabricated and verified to withstand inner pressure loadings higher than 1000 psi without failure for micro-high performance liquid chromatography (microHPLC) analysis. Fabrication of a high-aspect-ratio (internal channel height/internal channel width, greater than 20) quasi-rectangular-shaped embedded parylene channel has also been presented and characterized. Its implementation in a single-mask spiral parylene column longer than 1.1 m in a 3.3 mm x 3.3 mm square size on a chip has been demonstrated for prospective micro-gas chromatography (microGC) and high-density, high-efficiency separations. This proposed monolithic embedded channel technology can be extensively implemented to fabricate microchannels/columns in high-pressure microfluidics and high-performance/high-throughput chip-based micro total analysis systems (microTAS).

Microfluidic Analytical Techniques↗

PubMed2005

On-chip temperature gradient interaction chromatography.

This paper reports the first integrated microelectromechanical system (MEMS) HPLC chip that consists of a parylene high-pressure LC column, an electrochemical sensor, a resistive heater and a thermal-isolation structure for on-chip temperature gradient interaction chromatography application. The separation column was 8 mm long, 100 microm wide, 25 microm high and was packed with 5 microm sized, C18-coated beads using conventional slurry-packing technique. A novel parylene-enhanced, air-gap thermal isolation technology was used to reduce heater power consumption by 58% and to reduce temperature rise in the off-column area by 67%. The fabricated chip consumed 400 mW when operated at 100 degrees C. To test the chromatography performance of the fabricated system, a mixture of derivatized amino acids was chosen for separation. A temporal temperature gradient scanning from 25 to 65 degrees C with a ramping rate of 3.6 degrees C/min was applied to the column during separation. Successful chromatographic separation of derivatized amino acids was carried out using our chip. Compared with conventional temperature gradient HPLC system which incorporates "macro oven" to generate temporal temperature gradient on the column, our chip's thermal performance, i.e., power consumption and thermal response, is greatly improved without sacrificing chromatography quality.

Chromatography, High Pressure Liquid↗