Restoring atomic configuration at interfaces by image deconvolution.
The image deconvolution technique in combination with dynamical scattering effect correction developed previously for crystal defect investigation has been modified to meet the needs of interface studies and applied to a [111] twin model of Si. Elliptical windows are utilized as a new means for Fourier filtering and correcting the amplitudes of reflections. Images were simulated with a 200 kV field-emission high-resolution electron microscope. After image restoration, four images simulated with different defocus values were transformed into structure images with atomic columns revealed individually at correct positions. The effectiveness of the technique is discussed.
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