Quantitative imaging and microanalysis with a scanning soft x-ray microscope.
A scanning soft x-ray microscope has been developed that uses synchrotron radiation focused by a Fresnel zone plate to form a submicron beamspot on the specimen. Transmitted x-rays are detected and used to form a quantitative map of specimen absorptivity. Applications of the instrument to the imaging of whole wet cells and to the mapping of calcium in sections of bone are presented, with a resolution of 300 nm and an elemental sensitivity of 2 micrograms cm-2.
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