Biomedical subjects

F Levent Degertekin

Publications and source records attributed to F Levent Degertekin.

5 recordsLinked to original sources

PubMed2006

Bulk acoustic resonator based on piezoelectric ZnO belts.

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt-Leedom-Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.

Acoustics↗

PubMed2006

Annular-ring CMUT arrays for forward-looking IVUS: transducer characterization and imaging.

In this study, a 64-element, 1.15-mm diameter annular-ring capacitive micromachined ultrasonic transducer (CMUT) array was characterized and used for forward-looking intravascular ultrasound (IVUS) imaging tests. The array was manufactured using low-temperature processes suitable for CMOS electronics integration on a single chip. The measured radiation pattern of a 43 X 140-microm2 array element depicts a 40 degrees view angle for forward-looking imaging around a 15-MHz center frequency in agreement with theoretical models. Pulse-echo measurements show a -10-dB fractional bandwidth of 104% around 17 MHz for wire targets 2.5 mm away from the array in vegetable oil. For imaging and SNR measurements, RF A-scan data sets from various targets were collected using an interconnect scheme forming a 32-element array configuration. An experimental point spread function was obtained and compared with simulated and theoretical array responses, showing good agreement. Therefore, this study demonstrates that annular-ring CMUT arrays fabricated with CMOS-compatible processes are capable of forward-looking IVUS imaging, and the developed modeling tools can be used to design improved IVUS imaging arrays.

Equipment Design↗

PubMed2006

CMUTS with dual-electrode structure for improved transmit and receive performance.

In this paper, we introduce capacitive micro-machined ultrasonic transducers (CMUTs) with electrically isolated multiple electrodes embedded in the same silicon nitride CMUT membrane. Some of the advantages of this structure are demonstrated using a dual-electrode CMUT with separate transmit and receive electrodes as an example. By locating the transmit electrodes near the edges of a rectangular CMUT membrane, the stable displacement range, hence the maximum pressure amplitude during transmit mode is increased without collapsing the membrane when operated within static collapse voltage range. In the receive mode, the center receive electrode is brought closer to the substrate by biasing the side electrodes, and a higher electromechanical transformer ratio is obtained at low direct current (DC) bias. Therefore, dual-electrode CMUT has an effectively larger gap as compared to conventional CMUT during transmit, and it has an effectively smaller gap during receive. Demonstrative experiments are performed on dual-electrode CMUTs with rectangular membranes with different side and center electrode sizes for transmit and receive measurements. By using the two 4-microm wide side electrodes and an 8-microm wide center electrode on a 20-microm wide membrane, a 6.8 dB increase in maximum output pressure is obtained with side electrode excitation as compared to conventional center electrode. Similarly, the receive performance improvement was demonstrated while reducing the DC bias requirements. Simple finite-element and equivalent circuit-based models were developed to successfully model the behavior of dual-electrode CMUTs. Simulations show that, with simple modifications, more than 10 dB overall sensitivity improvement is feasible with dual-electrode CMUTs with rectangular membranes.

Computer-Aided Design↗

PubMed2004

Directional scholte wave generation and detection using interdigital capacitive micromachined ultrasonic transducers.

Directional generation and detection of Scholte waves and other guided modes in liquids and microfluidic channels by capacitive micromachined ultrasonic transducers (cMUTs) is reported. An interdigital transducer structure along with a phased-excitation scheme is used to enhance the directionality of Scholte interface waves in microfluidic environments. Finite element models are developed to predict the performance of the devices in both fluid half-spaces and microchannels. Experiments on the interdigital cMUTs show that a five-finger-pair device in a water half-space has 12 dB of directionality in generating Scholte waves at the design frequency of 10 MHz. A 10-finger device operating at 10 MHz in a water-filled microchannel has 13.4 dB of directionality. These directionality figures agree well with the modeling results. Using the results of the finite element model of a cMUT in a fluid half-space, it was determined that 41% of the acoustic power radiated into the fluid is contained in the Scholte wave propagating in the desired lateral direction. Transducers are demonstrated to perform bidirectional pumping in fluid channels with input power levels in the milliwatt range. Interdigital cMUTs fabricated using low temperature processes can be used as compact ultrasonic transducers with integrated electronics for sensing and actuation in fluidic environments.

Journal Article↗

PubMed2003

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection.

Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz.

Journal Article↗