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Florian Bociort

Publications and source records attributed to Florian Bociort.

2 recordsLinked to original sources

Networks of local minima in optical system optimization.

We discuss a surprising new feature of the merit function landscape in optical system design. When certain conditions are satisfied, the local minima form a network in which all nodes are connected. Each link between two neighboring minima contains a saddle point with a Morse index of 1. For a simple global optimization search (the symmetric Cooke triplet), the network of the corresponding set of local minima is presented.

Journal Article↗

Analysis, search, and classification for reflective ring-field projection systems.

Extreme ultraviolet (EUV) lithography uses reflective ring-field projection systems. Geometrical obstruction limits the possible system configurations to small domains of the parameter space. We present an analysis, a search method, and a classification of these unobstructed domains. The exhaustive search method based on paraxial analysis provides an effective means for determining all possible design forms and for finding useful starting configurations for optimization. The approach is validated through comparison with finite ray tracing.

Journal Article↗