Biomedical subjects

Fu-Hsiang Ko

Publications and source records attributed to Fu-Hsiang Ko.

5 recordsLinked to original sources

PubMed2005

Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption--gas chromatography--mass spectrometry.

This study established an analytical method for the trace analyses of two phthalate esters, including diethyl phthalate (DEP) and di-n-butyl phthalate (DBP), known as the major constituents of cleanroom micro-contamination detrimental to the reliability of semiconductor devices. Using thermal desorption coupled with a GC-MS system, standard tubes were prepared by delivering liquid standards pre-vaporized by a quasi-vaporizer into Tenax GR tubes for calibration. This method was capable of achieving detection limits of 0.05 microg m(-3) for 0.1 m3 air samples and 0.03 ng cm(-2) for 150-mm wafer surface density. Actual samples collected from a semiconductor cleanroom showed that the concentration of DBP in a polypropylene wafer box (0.45 microg m(-3)) was nearly four times higher than that in the cleanroom environment (0.12 microg m(-3)). The surface contamination of DBP was 0.67 ng cm(-2) for a wafer stored in the wafer box for 24 h. Furthermore, among the three types of heat-resistant O-ring materials tested, Kalrez was found to be particularly suitable for high-temperature processes in semiconductor cleanrooms due to their low emissions of organic vapors. This analytical procedure should serve as an effective monitoring method for the organic micro-contamination in cleanroom environments.

Air Pollutants↗

PubMed2005

Combining optical lithography with rapid microwave heating for the selective growth of Au/Ag bimetallic core/shell structures on patterned silicon wafers.

We demonstrate a novel approach for the production of patterned films of nanometer-sized Au/Ag bimetallic core/shell nanoparticles (NPs) on silicon wafers. In this approach, we first self-assembled monodisperse Au NPs, through specific Au...NH(2) interactions, onto a silicon substrate whose surface had been modified with a pattern of 3-aminopropyltrimethoxysilane (APTMS) groups to form a sandwich structure having the form Au NPs/APTMS/SiO(2). These Au NPs then served as seeds for growing the Au/Ag bimetallic core/shell NPs: we reduced silver ions to Ag metal on the surface of Au seeds under rapid microwave heating in the presence of sodium citrate. Energy-dispersive X-ray analysis confirmed that the Au/Ag bimetallic core/shell NPs grew selectively on the regions of the surface of the silicon wafer that had been patterned with the Au seeds. Scanning electron microscopy images revealed that we could synthesize well-scattered, high-density (>82%) thin films of Au/Ag bimetallic core/shell NPs through the use of this novel strategy. The patterned structures that can be formed are simple to produce, easily controllable, and highly reproducible; we believe that this approach will be useful for further studies of nanodevices and their properties.

Journal Article↗

PubMed2005

Studying the size/shape separation and optical properties of silver nanoparticles by capillary electrophoresis.

This paper describes the feasibility of employing capillary electrophoresis (CE) to separate silver particles in nanometer regimes. We have found that the addition of an anionic surfactant, sodium dodecyl sulphate (SDS), to the running electrolyte prevents coalescence of the silver particles during the process, which improves the separation performance; the concentration of SDS required for optimal silver nanoparticle separation is ca. 20 mM. By monitoring the electropherograms using a diode-array detection (DAD) system, we have also investigated the separation of suspended silver nanorods with respect to their shapes. Our results demonstrate that the combination of CE and DAD is a powerful one for the separation and characterization of various silver nanoparticles.

Electrophoresis, Capillary↗

PubMed2004

In-channel dual-electrode amperometric detection in electrophoretic chips with a palladium film decoupler.

An electrophoretic microchip integrated with a Pd-film decoupler and a series-dual electrode was proven practical (200-800 V/cm) for routine amperometric detection. In fluidic systems, amperometric enhancement of parallel-opposed dual-electrode detection is due to redox cycling of analytes between the electrodes. We, however, found that the oxidation current of catecholamines was enhanced significantly (1.9-3.8 folds) by switching from the single electrode mode to dual-series mode. This novel finding was unexpected because the unidirectional flow characteristic of the microfluidic system should eliminate the possibility for analytes physically migrating back and forth between the upstream and downstream electrodes. We attribute the enhancement to turbulence generated by impinging of the flow onto the edge of the downstream electrode. The linear range, sensitivity, limit of detection (S/N = 3) and number of theoretical plates for DA and CA are, respectively, 0.5-50 microM, 47 pA/microM, 0.25 microM, 7000 m(-1) and 1.0-100 microM, 28 pA/microM, 0.49 microM, 15,000 m(-1).

Catecholamines↗

PubMed2002

Fabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications.

We demonstrate an antireflective coating structure, which is based on the three-layer metal interference called the Fabry-Perot structure, for a deep-ultraviolet binary mask. The antireflective coating structure is composed of a metal-oxide-metal stack. By addition of different optimized structures, reflectances of less than 1.5% at both 248 and 193 nm have been achieved. At the three-layer Fabry-Perot structure, the bottom chrome layer provides suitable absorption. By controlling the thickness of the intermediate silicon oxide layer, we can tune the minimum-reflection regime to the desired exposure wavelength. The top metal layer can prevent charge accumulation during e-beam writing.

Journal Article↗