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Gerald E Jellison

Publications and source records attributed to Gerald E Jellison.

3 recordsLinked to original sources

Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope.

A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 microm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).

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Determination of optical birefringence by using off-axis transmission ellipsometry.

Utilizing transmission ellipsometry at small angles of incidence, it is shown that c-cut uniaxial samples can be used to determine both the miscut of the optic axis with respect to the plane of incidence as well as very accurate values of the spectroscopic birefringence. For example, wafers of ZnO, LiNbO3, and 6H-SiC single-crystals are examined and the miscut direction and the spectroscopic birefringence are determined. While all materials show strong dispersion in birefringence, ZnO exhibits a distinct isotropic point at 396.8 nm.

Journal Article↗

Transmission two-modulator generalized ellipsometry measurements.

The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of approximately 40 microm. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates.

Journal Article↗