Biomedical subjects

Hideki Hinosugi

Publications and source records attributed to Hideki Hinosugi.

3 recordsLinked to original sources

PubMed2003

Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry.

A nonmechanical scanning Mirau-type spectral interference microscope has been developed for the measurement of three-dimensional surface profiles of discontinuous objects. An acousto-optic tunable filter (AOTF) is used as a high-resolution spectral filter, which scans the optical frequency of the broadband light emitted from a superluminescent diode. To generate spectral fringes that make full use of the limited coherence length of the filtered light we unbalanced the Mirau interferometric system by positioning the reference mirror nearly halfway between the top and the bottom of the step height. When the frequency of the broadband light source is scanned by an AOTF, the interference fringes move in opposite directions on the top and the bottom of the object. To uniquely determine the sign of the fringe movement over the large area of the object, we developed a three-dimensional Fourier-transform technique, and from the detected sign of the fringe movement and phase information, we determined the three-dimensional step height. Experimental results of the measurement of 100-microm step height are presented. The main advantages of the proposed system are that it provides nonmechanical scanning and a large measurement range without ambiguity in the sign of the phase.

Journal Article↗

PubMed2003

Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement.

The maximum measurable range of a spectral interference microscope depends on the coherence length of the light transmitted by its tunable spectral filter. To achieve a large range in step-height measurement we have developed a new tunable spectral filter that uses tandem liquid-crystal Fabry-Perot interferometers (LC-FPIs), which can simultaneously attain both a high spectral resolution and a large tuning range. Fringe visibility measurements were carried out, and it was found that the coherence length of the light transmitted through tandem LC-FPIs is two times larger than that transmitted through a single LC-FPI. Using this novel tunable spectral filter, we developed a new spectral interference microscope for the measurement of three-dimensional shapes of discontinuous objects. Experimental results of step-height measurements both with a single LC-FPI and with tandem LC-FPIs are presented for a combination of standard steel gauge block sets with 1-, 99-, and 100-microm steps. A large range (1-100 microm) of measurement with submicrometer resolution was achieved with tandem LC-FPIs that was not possible with our previous system in which a single LC-FPI was used.

Journal Article↗

PubMed2002

Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope.

A noncontact, nonmechanical scanning, wide-field spectral interference microscope is developed for simultaneous measurement of three-dimensional step-height of discontinuous objects and tomographic imaging. A superluminescent diode (SLD) is used as a broadband light source and a liquid-crystal Fabry-Perot interferometer (LC-FPI) as a frequency-scanning device. By means of changing the injection current to the SLD, the spectral profile of the SLD is equalized, and a constant light input to the interferometer is achieved over the entire frequency-scan range. The Fourier-transform technique is used to determine both the amplitude and the phase of spectral fringe signals. Three-dimensional height distribution of a discontinuous object is obtained from the phase information, whereas optically sectioned images of the object are obtained either from the amplitude information alone or from the combination of both the amplitude and phase information. Experimental results with submicrometer resolution are presented for both step-height measurement and tomographic sectioning.

Imaging, Three-Dimensional↗