IR imaging using uncooled microcantilever detectors.
Uncooled bimaterial microcantilever detectors were fabricated and used to obtain infrared (IR) images of objects at temperatures ranging from room temperature to a few hundred degrees C. Images were obtained using both single 50 micro m x 50 micro m microcantilever IR detectors and arrays of microcantilever detectors. Thermal radiation from the target object was imaged onto the detector and the resulting temperature change caused microcantilever bending due to the bimaterial effect. This micromechanical bending was measured using two different non-contact optical readout techniques and IR images were obtained. A smaller size (20 micro m x 20 micro m) microcantilever IR detector was also used to capture IR images of near room temperature objects.