A fast automatic RBS/w channeling system for damage depth profiling.
A computer-aided data acquisition coupling with goniometer-control system dedicated for damage depth profile measurements is established. The channeling direction searching is performed along tilt and azimuth directions. The system includes a computer code to convert the measured spectra into damage depth profile. The analyzing time for each sample requires approximately 20-30 min. The damage depth profiles of the self-implanted (100) silicon samples are in reasonable agreement with the calculated results yielded by the SRIM Monte-Carlo simulation code.
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