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M Ohler

Publications and source records attributed to M Ohler.

3 recordsLinked to original sources

X-ray diffraction topography using a diffractometer with a bendable monochromator at a synchrotron radiation source.

The different properties of laboratory- and synchrotron-based double-crystal setups for X-ray topographic applications are discussed as a basis for the realization of a versatile instrument allowing the investigation of all kinds of crystals with high strain sensitivity and without any reduction in image size. It appears that the use of a bendable highly perfect monochromator (silicon) achieves this goal, through the local adaptation of Bragg angles, to compensate either dispersion or a bending of the sample.

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Theory of moiré fringes on X-ray diffraction topographs of bicrystals.

The theory of moiré fringes on X-ray diffraction topographs of bicrystals is derived from the dynamical theory of X-ray diffraction for the reflection (Bragg) and the transmission (Laue) case. The influence on the moiré fringes of the diffraction geometry, of the geometry of the sample, of its optical properties and of the topographic method is investigated. The perfect-crystal theory is also expanded to weakly deformed bicrystals.

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X-ray diffraction moiré topography as a means to reconstruct relative displacement fields in weakly deformed bicrystals.

X-ray diffraction topographs of wafers produced by separation by implanted oxygen (SIMOX) show moiré fringes in both reflection and transmission geometry. These fringes reveal deformations of the order of 10(-6) to 10(-8) between the layer and the substrate of the SIMOX material. A new method for a quantitative analysis of moiré fringes is developed and allows reconstruction with a high sensitivity of the three components of the relative displacement field between layer and substrate directly from a set of topographs. This method is used for the interpretation of moiré topographs of entire 4 in SIMOX wafers and of regions around crystal defects. Finally, the capabilities of an analysis of moiré fringes are compared with those of the usual diffraction topo-graphy.

Journal Article↗