N W Emanetoglu | PubMed Health

PubMed2001

A multi-IDT input tunable surface acoustic wave filter.

Tunable surface acoustic wave (SAW) filters (TSF) have been widely used in the wireless telecommunication systems. A prototype of a multi-IDT (interdigital transducer) input TSF has been developed. The device consists of 11 IDT paralleled in the SAW propagation path. Different SAW filter configurations are realized by selecting or combining various IDTs, resulting in the tunability of both center frequency and 3 dB bandwidth. The center frequencies of the SAW filter range from 126.8 to 199.1 MHz; the 3 dB bandwidths range from 15.2 to 58.9 MHz. Impedance weighting methods have been applied. The passband ripple has been reduced from 6.44 to 1.37 dB after resistance weighting.

Journal Article↗

PubMed2001

Analysis of SAW properties of epitaxial ZnO films grown on R-Al2O3 substrates.

ZnO thin films with a high piezoelectric coupling coefficient are widely used for high frequency and low loss surface acoustic wave (SAW) devices when the film is deposited on top of a high acoustic velocity substrate, such as diamond or sapphire. The performance of these devices is critically dependent on the quality of the ZnO films as well as of the interface between ZnO and the substrate. In this paper, we report the studies on piezoelectric properties of epitaxial (1120) ZnO thin films grown on R-plane sapphire substrates using metal organic chemical vapor deposition (MOCVD) technique. The c-axis of the ZnO film is in-plane. The ZnO/R-Al2O3 interface is atomically sharp. SAW delay lines, aligned parallel to the c-axis, were used to characterize the surface wave velocity, coupling coefficient, and temperature coefficient of frequency as functions of film thickness to wavelength ratio (h/lambda). The acoustic wave properties of the material system were calculated using Adler's matrix method, and the devices were simulated using the quasi-static approximation based on Green's function analysis.

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