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Osami Sasaki

Publications and source records attributed to Osami Sasaki.

4 recordsLinked to original sources

Double sinusoidal phase-modulating distributed-Bragg-reflector laser-diode interferometer for distance measurement.

A previously proposed double sinusoidal phase-modulating (DSPM) laser-diode interferometer measures distances larger than a half-wavelength by detecting modulation depth. Although it requires a vibrating mirror to provide the second modulation to the interference signal, such vibrations naturally affect measurement accuracy. We propose a static-type DSPM laser-diode interferometer that uses no mechanical modulation. Our experimental results indicate a measurement error of +/- 1.6 microm.

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Sinusoidal-wavelength-scanning interferometer with double feedback control for real-time distance measurement.

In addition to a conventional phase a the interference signal of a sinusoidal-wavelength-scanning interferometer has a phase-modulation amplitude Zb that is proportional to the optical path difference L and amplitude b of the wavelength scan. L and b are controlled by a double feedback system so that the phase alpha and the amplitude Zb are kept at 3pi/2 and pi, respectively. The voltage applied to a device that displaces a reference mirror to change the optical path difference becomes a ruler with scales smaller than a wavelength. Voltage applied to a device that determines the amplitude of the wavelength scan becomes a ruler marking every wavelength. These two rulers enable one to measure an absolute distance longer than a wavelength in real time.

Journal Article↗

Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer.

A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly influences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the standard video rate.

Journal Article↗

Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation.

We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-microm step height was accurately detected.

Journal Article↗