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P R Munroe

Publications and source records attributed to P R Munroe.

4 recordsLinked to original sources

The application of FIB milling for specimen preparation from crystalline germanium.

The effectiveness of focused ion beam (FIB) for preparation of crystalline germanium specimens has been studied. FIB milling results in strong cellular relief of the germanium surfaces on bulk specimens. This cellular relief, associated with the generation of high densities of point defects during interaction of the specimen with the high-energy gallium beam, can be reduced by using either a lower ion beam currents or a lower beam energy. Even under these milling conditions the cellular relief is, however, still evident on the surface of the TEM specimens as evidenced by so-called 'curtaining' relief. Nevertheless good quality specimens for both conventional and high-resolution imaging may be prepared using FIB milling if low currents are employed for final milling.

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FIB-induced damage in silicon.

The damage created in silicon transmission electron microscope specimens prepared using a focused ion beam miller is assessed using cross-sections of trenches milled under different beam conditions. Side-wall damage consists of an amorphous layer formed by direct interaction with the energetic gallium ion beam; a small amount of implanted gallium is also detected. By contrast, bottom-wall damage layers are more complex and contain both amorphous films and crystalline regions that are richer in implanted gallium. More complex milling sequences show that redeposition of milled material, enriched in gallium, can occur depending on the geometry of the mill employed. The thickness of the damage layers depends strongly on beam energy, but is independent of beam current. Monte Carlo modelling of the damage formed indicates that recoil silicon atoms contribute significantly to the damaged formed in the specimen.

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Redeposition effects in transmission electron microscope specimens of FeAl-WC composites prepared using a focused ion beam.

Artifacts associated with transmission electron microscope (TEM) specimens prepared using a focused ion beam (FIB) are not well understood, especially those in non-semiconductor materials. In this paper the extent and origins of artifacts associated with redeposition of milled material in TEM specimens of a FeAl--WC metal matrix composite prepared by FIB were investigated. Cross-sections were prepared normal to an initial FIB cut that allowed direct observation of any damage layers, which are believed to be associated with both redeposition of sputtered material and amorphisation of the surface of the specimen by the ion beam. Techniques for the minimisation of redeposition using either final cleaning mills at low accelerating voltages or plasma cleaning were also investigated and found to be ineffective in removing or reducing these damaged layers. TEM cross-sections of specimens treated using low energy mills and plasma cleaning, further confirmed that these techniques did little to reduce any redeposited or amorphous material.

Aluminum Compounds↗

Transmission Electron Microscope Specimen Preparation of Metal Matrix Composites Using the Focused Ion Beam Miller.

Transmission electron microscope samples of two types of metal matrix composites were prepared using both traditional thinning methods and the more novel focused ion beam miller. Electropolishing methods were able to produce, very rapidly, thin foils where the matrix was electron transparent, but the ceramic reinforcement particles remained unthinned. Thus, it was not possible in these foils to study either the matrix-reinforcement interface or the microstructure of the reinforcement particles themselves. In contrast, both phases in the composites prepared using the focused ion beam miller thinned uniformly. The interfaces in these materials were clearly visible and the ceramic reinforcement was electron transparent. However, microstructural artifacts associated with ion beam damage were also observed. The extent of these artifacts and methods of minimizing their effect were dependent on both the materials and the milling conditions used.

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