Biomedical subjects
Publications and source records attributed to Petre C Logofătu.
The Abelès method is a classical method for determining the refractive index of dielectric thin films. In this paper we examine the main features of the method in a formal manner, using closed-form equations, and we show that the method is ambiguous in certain yet unreported situations.
An optimization method for the sensitivity of diffraction efficiency measurements is presented. I define the sensitivity as the estimation precision of the grating parameters. The optimization method called sensitivity analysis for fitting scans all the possible measurement configurations and selects the configuration that yields the best sensitivity. The scan is made over the domain of the experimental parameters of the arrangement, such as the azimuth angle of the grating and the orientation angles of the analyzer and the polarizer. These parameters can be freely varied, and among the multitude of possible combinations there is one configuration that provides optimum sensitivity. Comparison with experimental results reveals a qualitative agreement between theory and practice.
Phase-modulation scatterometry is a metrology technique for determining, by means of a phase modulator as a key device, the parameters of gratings. The main source of error to be dealt with are the fluctuations of the phase-modulation amplitude. The grating zeroth-order reflectance modulated by the phase modulator is converted into a signal by the photodetector. The measurables are the direct term and the first two harmonics of the signal. For experimental data fitting, we used the ratio of the harmonics over the direct term because it significantly improves the accuracy. A sensitivity analysis was performed for two samples, one real and one theoretical, to find the measurement configuration that insures optimum determination precision for the grating parameters. For the real sample, comparison of the theoretical predictions for sensitivity with the actual values showed a good agreement. For both samples the sensitivity analysis indicated subnanometric precision for the critical dimension (grating linewidth).