Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs substrates.
The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 microm thick grid of patterned photoresist supports the 2 microm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. A simplified analysis of device operation is also presented.
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