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Ryutaro Maeda

Publications and source records attributed to Ryutaro Maeda.

5 recordsLinked to original sources

Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers.

To develop x-ray mirrors for micropore optics, smooth silicon (111) sidewalls obtained after anisotropic wet etching of a silicon (110) wafer were studied. A sample device with 19 microm wide (111) sidewalls was fabricated using a 220 microm thick silicon (110) wafer and potassium hydroxide solution. For what we believe to be the first time, x-ray reflection on the (111) sidewalls was detected in the angular response measurement. Compared to ray-tracing simulations, the surface roughness of the sidewalls was estimated to be 3-5 nm, which is consistent with the atomic force microscope and the surface profiler measurements.

Anisotropy↗

Interface motion of capillary-driven flow in rectangular microchannel.

In microchannel flow, gas-liquid interface behavior is important for developing a wide range of microfluidic applications, especially in passive microfluidic systems. This paper presents a discussion of interface motion driven by capillary action in a microchannel. We have extended the theory beyond the previous theory of capillary rise problem for a circular tube, to a rectangular microchannel. The same formula for the relation between nondimensional time and interface position is obtained as for a circular tube. We examined rectangular microchannels with several sizes (about 50 to 100 microm square) of glass capillaries and 85 x 68 microm and 75 x 45 microm polydimethylsiloxane (PDMS) microchannels fabricated by photolithography technique, respectively. We observed movement of the gas-liquid interface position and compared it to the dimensionless relation. We obtained the value of a dimensionless variable of driving force that is related to dynamic contact angles for glass-water, glass-ethanol, and PDMS-ethanol. Using this variable, interface motion can be predicted for any size of rectangular channels.

Journal Article↗

p-type macroporous silicon having three-dimensional structure.

Macroporous silicon with three-dimensional structure was fabricated using organic-based electrolyte, dimethylformamide (DMF), in the p-type silicon. The obtained three-dimensional macroporous structures grew wholly along the <100> orientation of the p-type silicon wafer.

Journal Article↗

Socket with built-in valves for the interconnection of microfluidic chips to macro constituents.

This paper reports a prototype for a standard connector between a microfluidic chip and the macro world. This prototype demonstrate a fully functioning socket for a microchip to access the outside world by means of fluids, data signals and energy supply. It supports up to 10 channels for the input and output of liquids or gases, as well as compressed air or vacuum lines for pneumatic power lines. The socket has built-in valves for each flow channel. It also contains 28 pins for the connection of electrical signals and power. Built-in valves make it possible to control the flow in each channel independently. A chip ( 11.0 x 11.0 x 0.9 mm) can be mounted into or dismounted from the socket with one touch. The fluidic connectors of the socket are designed to contact vertically on the top of chip. And the electrical connectors (the spring array) of that physically support the chip and contact lead pads at the bottom of chip. No adhesives or solders are used at any contact points. The pressure limit for the connection of working fluids was 0.2 MPa and the current limit for the electrical connections was 1 A. This socket supports both serial and parallel processing applications. It exhibits great potential for developing microfluidic systems efficiently.

Equipment Design↗

A world-to-chip socket for microfluidic prototype development.

We report a prototype for a standard connector between a microfluidic chip and the macroworld. This prototype is the first to demonstrate a fully functioning socket for a microchip to access the outside world by means of fluids, data, and energy supply, as well as providing process visibility. It has 20 channels for the input and output of liquids or gases, as well as compressed air or vacuum lines for pneumatic power lines. It also contains 42 pins for electrical signals and power. All these connections were designed in a planar configuration with linear orthogonal arrays. The vertical space was opened for optical measurement and evaluation. The die (29.1 mm x 27.5 mm x 0.9 mm) can be easily mounted and dismounted from the socket. No adhesives or solders are used at any contact points. The pressure limit for the connection of working fluids was 0.2 MPa and the current limit for the electrical connections was 1 A. This socket supports both serial and parallel processing applications. It exhibits great potential for developing microfluidic systems efficiently.

Electrochemistry↗