Automated small tilt-angle measurement using Lau interferometry.
A technique for a tilt-angle measurement of reflecting objects based on the Lau interferometry coupled with the moire readout has been proposed. A white-light incoherent source illuminates a set of two gratings, resulting in the generation of the Fresnel image due to the Lau effect. The Fresnel image is projected onto a reflecting object. The image reflected from the object is superimposed onto an identical grating, which results in the formation of a moiré fringe pattern. The inclination angle of moiré fringes is a function of tilt angle of the object. Theory and experimental arrangement of the proposed technique is presented and results of the investigation are reported.
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