Biomedical subjects

Ulf Griesmann

Publications and source records attributed to Ulf Griesmann.

2 recordsLinked to original sources

PubMed2006

Three-flat test solutions based on simple mirror symmetry.

In interferometric surface and wavefront metrology, three-flat tests are the archetypes of measurement procedures to separate errors in the interferometer reference wavefront from errors due to the test part surface, so-called absolute tests. What is believed to be a new class of solutions of the three-flat problem for circular flats is described in terms of functions that are symmetric or antisymmetric with respect to reflections at a single line passing through the center of the flat surfaces. The new solutions are simpler and easier to calculate than the known solutions based on twofold mirror symmetry or rotation symmetry. Strategies for effective azimuthal averaging and a method for determining the averaging error are also discussed.

Journal Article↗

PubMed2002

Absolute refractive indices and thermal coefficients of CaF2, SrF2, BaF2, and LiF near 157 nm.

We present high-accuracy measurements for wavelengths near 157 nm of the absolute index of refraction, the index dispersion, and the temperature dependence of the index for the ultraviolet optical materials with cubic symmetry: CaF2, SrF2, BaF2, and LiF. Accurate values of these quantities for these materials are needed for designs of the lens systems for F2 excimer-laser-based exposure tools for 157-nm photolithography. These tools are expected to use CaF2 as the primary optical material and possibly one of the others to correct for chromatic aberrations. These optical properties were measured by the minimum deviation method. Absolute refractive indices were obtained with an absolute accuracy of 5 x 10(-6) to 6 x 10(-6).

Journal Article↗