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W Slówko

Publications and source records attributed to W Slówko.

2 recordsLinked to original sources

Compensation of the shadowing error in three-dimensional imaging with a multiple detector scanning electron microscope.

A method for three-dimensional quantitative surface characterization for scanning electron microscopy is presented. The method used a quadruple scintillator detector developed by us. A surface reconstruction algorithm was performed by special software, with new algorithms for error compensation. Among these errors, detector shadowing was of particular importance. This was due to the disturbance in integration continuity when one or more detectors was screened from the flow of electrons. Several methods for the reduction of this error have been proposed and tested by us. The methods were based on software processing of complementary information, such as unshadowed detector signals, shadow depth and modified integration schemes.

Journal Article↗

New system for secondary electron detection in variable-pressure scanning electron microscopy.

A novel secondary electron detection system combining a two-stage detector head and a differential pumping system is presented. The detector head consisted of a scintillation Everhart-Thornley detector and a microsphere plate, separating it from the lower vacuum in the intermediate chamber (below 0.1 mbar). The system was arranged asymmetrically, which should contribute to a lower gas leakage through the plate and a longer life span of the plate. The system offered all the advantages of the scintillator detector in a wide range of gas pressures, from high vacuum to those of the order of 10 mbar, typical of high-pressure scanning electron microscopy.

Journal Article↗