@misc{indiciae719859f8e909,
  title = {Defects in diamond thin films.},
  author = {M Fanciulli and TD Moustakas},
  year = {1993},
  doi = {10.1103/physrevb.48.14982},
  url = {https://pubmed.ncbi.nlm.nih.gov/10008029/},
  note = {Source identifier: 10008029}
}