@misc{indiciaef30306ef08ff,
  title = {X-ray diffraction from a coherently illuminated Si(001) grating surface.},
  author = {Q Shen and CC Umbach and B Weselak and JM Blakely},
  year = {1993},
  doi = {10.1103/physrevb.48.17967},
  url = {https://pubmed.ncbi.nlm.nih.gov/10008433/},
  note = {Source identifier: 10008433}
}