@misc{indiciaefc5df9dba7e5,
  title = {Model for amorphization processes in ion-implanted Si.},
  author = {T Motooka},
  year = {1994},
  doi = {10.1103/physrevb.49.16367},
  url = {https://pubmed.ncbi.nlm.nih.gov/10010787/},
  note = {Source identifier: 10010787}
}