@misc{indiciae949321d74895, title = {High-temperature SiO2 decomposition at the SiO2/Si interface.}, author = {R Tromp and GW Rubloff and P Balk and FK LeGoues and van Loenen EJ}, year = {1985}, doi = {10.1103/physrevlett.55.2332}, url = {https://pubmed.ncbi.nlm.nih.gov/10032113/}, note = {Source identifier: 10032113} }