@misc{indiciae1f0f63035549, title = {Thermal-equilibrium defect processes in hydrogenated amorphous silicon.}, author = {ZE Smith and S Aljishi and D Slobodin and V Chu and S Wagner and PM Lenahan and RR Arya and MS Bennett}, year = {1986}, doi = {10.1103/physrevlett.57.2450}, url = {https://pubmed.ncbi.nlm.nih.gov/10033728/}, note = {Source identifier: 10033728} }