@misc{indiciaeffc2fea1bf90,
  title = {Defect microchemistry at the SiO2/Si interface.},
  author = {GW Rubloff and K Hofmann and M Liehr and DR Young},
  year = {1987},
  doi = {10.1103/physrevlett.58.2379},
  url = {https://pubmed.ncbi.nlm.nih.gov/10034730/},
  note = {Source identifier: 10034730}
}