@misc{indiciae822e4106942a,
  title = {Subharmonics and rf-plasma sheaths.},
  author = {PA Miller and LA Romero and PD Pochan},
  year = {1993},
  doi = {10.1103/physrevlett.71.863},
  url = {https://pubmed.ncbi.nlm.nih.gov/10055387/},
  note = {Source identifier: 10055387}
}