@misc{indiciae4d1992b6fb60,
  title = {Boron diffusion in strained Si1-xGex epitaxial layers.},
  author = {N Moriya and LC Feldman and HS Luftman and CA King and J Bevk and B Freer},
  year = {1993},
  doi = {10.1103/physrevlett.71.883},
  url = {https://pubmed.ncbi.nlm.nih.gov/10055392/},
  note = {Source identifier: 10055392}
}