@misc{indiciae4df644e988c2, title = {Self-aligned sources for dislocation nucleation: The key to low threading dislocation densities in compositionally graded thin films grown at low temperature.}, author = {FK LeGoues}, year = {1994}, doi = {10.1103/physrevlett.72.876}, url = {https://pubmed.ncbi.nlm.nih.gov/10056557/}, note = {Source identifier: 10056557} }