TY - RPRT TI - Self-aligned sources for dislocation nucleation: The key to low threading dislocation densities in compositionally graded thin films grown at low temperature. AU - FK LeGoues PY - 1994 DO - 10.1103/physrevlett.72.876 UR - https://pubmed.ncbi.nlm.nih.gov/10056557/ ID - 10056557 ER -