TY - RPRT TI - Structural transformations and defect production in ion implanted silicon: a molecular dynamics simulation study. AU - Diaz de la Rubia T AU - GH Gilmer PY - 1995 DO - 10.1103/physrevlett.74.2507 UR - https://pubmed.ncbi.nlm.nih.gov/10057945/ ID - 10057945 ER -