@misc{indiciae820ee08fb9f9,
  title = {Quantitative electron spectroscopic imaging studies of microelectronic metallization layers.},
  author = {J Marien and JM Plitzko and R Spolenak and R Keller and J Mayer},
  year = {1999},
  doi = {10.1046/j.1365-2818.1999.00476.x},
  url = {https://pubmed.ncbi.nlm.nih.gov/10320541/},
  note = {Source identifier: 10320541}
}