TY  - RPRT
TI  - Quantitative electron spectroscopic imaging studies of microelectronic metallization layers.
AU  - J Marien
AU  - JM Plitzko
AU  - R Spolenak
AU  - R Keller
AU  - J Mayer
PY  - 1999
DO  - 10.1046/j.1365-2818.1999.00476.x
UR  - https://pubmed.ncbi.nlm.nih.gov/10320541/
ID  - 10320541
ER  -