@misc{indiciae05d7a8c18192,
  title = {Microfabrication techniques using focused ion beams and emergent applications.},
  author = {M J Vasile and R Nassar and J Xie and H Guo},
  year = {1999},
  doi = {10.1016/s0968-4328(99)00008-6},
  url = {https://pubmed.ncbi.nlm.nih.gov/10420642/},
  note = {Source identifier: 10420642}
}