TY - RPRT TI - Microfabrication techniques using focused ion beams and emergent applications. AU - M J Vasile AU - R Nassar AU - J Xie AU - H Guo PY - 1999 DO - 10.1016/s0968-4328(99)00008-6 UR - https://pubmed.ncbi.nlm.nih.gov/10420642/ ID - 10420642 ER -