@misc{indiciae93757b7551da,
  title = {Image sharpness measurement in the scanning electron-microscope--part III.},
  author = {N F Zhang and M T Postek and R D Larrabee and A E Vladár and W J Keery and S N Jones},
  doi = {10.1002/sca.4950210404},
  url = {https://pubmed.ncbi.nlm.nih.gov/10483879/},
  note = {Source identifier: 10483879}
}