TY  - RPRT
TI  - Image sharpness measurement in the scanning electron-microscope--part III.
AU  - N F Zhang
AU  - M T Postek
AU  - R D Larrabee
AU  - A E Vladár
AU  - W J Keery
AU  - S N Jones
DO  - 10.1002/sca.4950210404
UR  - https://pubmed.ncbi.nlm.nih.gov/10483879/
ID  - 10483879
ER  -