@misc{indiciae528f365fa8b3,
  title = {[Department of microbiosensing system using micromachine techniques].},
  author = {Y Murakami and E Tamiya},
  year = {1999},
  url = {https://pubmed.ncbi.nlm.nih.gov/10639819/},
  note = {Source identifier: 10639819}
}