@misc{indiciaefbd930d7722b,
  title = {Perspectives on MEMS in bioengineering: a novel capacitive position microsensor.},
  author = {A Pedrocchi and S Hoen and G Ferrigno and A Pedotti},
  year = {2000},
  doi = {10.1109/10.817612},
  url = {https://pubmed.ncbi.nlm.nih.gov/10646272/},
  note = {Source identifier: 10646272}
}