TY - RPRT TI - Perspectives on MEMS in bioengineering: a novel capacitive position microsensor. AU - A Pedrocchi AU - S Hoen AU - G Ferrigno AU - A Pedotti PY - 2000 DO - 10.1109/10.817612 UR - https://pubmed.ncbi.nlm.nih.gov/10646272/ ID - 10646272 ER -