TY - RPRT TI - Diffractive optical element based sensor for surface quality inspection of concave punches. AU - V Hyvärinen AU - R Silvennoinen AU - K Peiponen AU - T Niskanen PY - 2000 DO - 10.1016/s0939-6411(99)00071-5 UR - https://pubmed.ncbi.nlm.nih.gov/10704900/ ID - 10704900 ER -