@misc{indiciae0af3ee3c74c7,
  title = {Electrochemical micromachining},
  author = {R Schuster and V Kirchner and P Allongue and G Ertl},
  year = {2000},
  doi = {10.1126/science.289.5476.98},
  url = {https://pubmed.ncbi.nlm.nih.gov/10884233/},
  note = {Source identifier: 10884233}
}