TY - RPRT TI - Dislocation emission at the Silicon/Silicon nitride interface: A million atom molecular dynamics simulation on parallel computers AU - ME Bachlechner AU - A Omeltchenko AU - A Nakano AU - RK Kalia AU - P Vashishta AU - I Ebbsjo AU - A Madhukar PY - 2000 DO - 10.1103/physrevlett.84.322 UR - https://pubmed.ncbi.nlm.nih.gov/11015901/ ID - 11015901 ER -