@misc{indiciaeccfbec339828,
  title = {Polymeric microelectromechanical systems},
  author = {SA Soper and SM Ford and S Qi and RL McCarley and K Kelly and MC Murphy},
  year = {2000},
  doi = {10.1021/ac0029511},
  url = {https://pubmed.ncbi.nlm.nih.gov/11028604/},
  note = {Source identifier: 11028604}
}