@misc{indiciae6e75469cffd8, title = {Comment on "Quantum interferometric optical lithography: exploiting entanglement to beat the diffraction limit".}, author = {G S Agarwal and R W Boyd and E M Nagasako and S J Bentley}, year = {2001}, doi = {10.1103/physrevlett.86.1389}, url = {https://pubmed.ncbi.nlm.nih.gov/11178096/}, note = {Source identifier: 11178096} }