@misc{indiciaea9ed40d2d842,
  title = {Osmium-metal coating device using hollow-cathode plasma CVD method.},
  author = {H Akahori and M Handa and H Yoshida and Y Kozuka},
  year = {2000},
  doi = {10.1093/oxfordjournals.jmicro.a023866},
  url = {https://pubmed.ncbi.nlm.nih.gov/11270854/},
  note = {Source identifier: 11270854}
}