TY - RPRT TI - Osmium-metal coating device using hollow-cathode plasma CVD method. AU - H Akahori AU - M Handa AU - H Yoshida AU - Y Kozuka PY - 2000 DO - 10.1093/oxfordjournals.jmicro.a023866 UR - https://pubmed.ncbi.nlm.nih.gov/11270854/ ID - 11270854 ER -