@misc{indiciae580f2a03ba09,
  title = {Nanofabrication: conventional and nonconventional methods.},
  author = {Y Chen and A Pépin},
  year = {2001},
  doi = {10.1002/1522-2683(200101)22:2<187::aid-elps187>3.0.co;2-0},
  url = {https://pubmed.ncbi.nlm.nih.gov/11288885/},
  note = {Source identifier: 11288885}
}