TY  - RPRT
TI  - Nanofabrication: conventional and nonconventional methods.
AU  - Y Chen
AU  - A Pépin
PY  - 2001
DO  - 10.1002/1522-2683(200101)22:2<187::aid-elps187>3.0.co;2-0
UR  - https://pubmed.ncbi.nlm.nih.gov/11288885/
ID  - 11288885
ER  -