@misc{indiciae1d2c4329aee0,
  title = {Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.},
  author = {P Gall-Borrut and B Belier and P Falgayrettes and M Castagne and C Bergaud and P Temple-Boyer},
  year = {2001},
  doi = {10.1046/j.1365-2818.2001.00802.x},
  url = {https://pubmed.ncbi.nlm.nih.gov/11298866/},
  note = {Source identifier: 11298866}
}